On the accuracy of generation lifetime measurement in high-resistivity silicon using PN gated diodes

Autor: G.-F. Dalla Betta, Giovanni Soncini, G. U. Pignatel, Maurizio Boscardin, L. Bosisio, Giovanni Verzellesi
Přispěvatelé: Verzellesi, G., DALLA BETTA, G. F., Bosisio, Luciano, Boscardin, M., Pignatel, G. U., Soncini, G.
Rok vydání: 1999
Předmět:
Zdroj: IEEE Transactions on Electron Devices. 46:817-820
ISSN: 0018-9383
DOI: 10.1109/16.753724
Popis: We show that in high-resistivity silicon bulk generation lifetime and surface generation velocity can not be measured with acceptable accuracy using a single gated diode, unless the gate length is suitably tailored. The accuracy with which bulk generation lifetime can be evaluated is, in particular, limited by nonidealities, contributing extra components to the gated-diode current, which are not accounted for in the standard extraction procedure.
Databáze: OpenAIRE