Impact of the CNT growth process on gold metallization dedicated to RF interconnect applications
| Autor: | Dunlin Tan, Chin Chong Yap, Edwin Hang Tong Teo, Dominique Baillargeat, Beng Kang Tay, Hong Li, Christophe Brun |
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| Přispěvatelé: | MINACOM, XLIM (XLIM), Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS)-Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS), CINTRA / SEEE Nanyang Technological University, Nanyang Technological University [Singapour], Nanayang Technological University (NTU), Nanayang Technological University |
| Rok vydání: | 2010 |
| Předmět: |
010302 applied physics
Materials science Scanning electron microscope Coplanar waveguide Nanotechnology 02 engineering and technology Chemical vapor deposition Carbon nanotube 021001 nanoscience & nanotechnology 01 natural sciences law.invention Barrier layer Condensed Matter::Materials Science symbols.namesake Plasma-enhanced chemical vapor deposition law 0103 physical sciences symbols Radio frequency [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Electrical and Electronic Engineering 0210 nano-technology Raman spectroscopy ComputingMilieux_MISCELLANEOUS |
| Zdroj: | International Journal of Microwave and Wireless Technologies International Journal of Microwave and Wireless Technologies, Cambridge University Press/European Microwave Association 2010, pp.463-469 HAL |
| ISSN: | 1759-0795 1759-0787 |
| DOI: | 10.1017/s1759078710000681 |
| Popis: | Carbon nanotubes (CNTs) are a unique group of materials with high aspect ratio, mechanical and electrical properties, which are of great interests in the field of interconnects, and radio frequency applications. In order to incorporate CNTs into any of these applications successfully, one important issue that has to be resolved is the critical parameters (temperature and reactant gases) associated with the growth of the CNTs. As such, the effect of these growth requirements on the adjacent components should be studied. In this work, we examined specifically the effect of carbon nanotubes growth on the underlying metallization, in particular gold, dedicated for radio-frequency-based applications. The gold coplanar lines were annealed at 800°C in a plasma-enhanced chemical vapor deposition (PECVD) system to simulate the worst-case condition. The reflection and transmission parameters were analyzed using a probe station connected to a vector network analyzer. Carbon nanotubes grown on different barrier layers were also characterized using a scanning electron microscope and Raman spectroscopy to identify a suitable barrier layer for gold. Our results showed that it is promising to integrate carbon nanotubes grown using PECVD onto Au coplanar waveguide without degrading the S-parameters measurements up to 20 GHz. |
| Databáze: | OpenAIRE |
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