Evaluation of TMAH treatment for isolation process of N-polar GaN HEMTs
| Autor: | Gotow, Takahiro, Arai, Takahiro, Aota, Tomoya, MIYAMOTO, YASUYUKI |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 Compound Semiconductor Week (CSW). |
| DOI: | 10.1109/csw55288.2022.9930366 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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