Nano-Structure Studies of Perhydropolysilazane - Derived Silica Thin Layers

Autor:	Kazuhiro Akutsu-Suyama, Yoshio Hasegawa, Tomotake Niizeki
Rok vydání:	2021
Předmět:	Materials science Thin layers Chemical engineering Nano
Zdroj:	Prime Archives in Polymer Technology
DOI:	10.37247/pan.1.2021.14
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1252a231db80047965b76677537c8aac https://doi.org/10.37247/pan.1.2021.14 Zobrazit plný text záznamu