| Autor: |
Atwa, Yahya, Shakeel, Hamza |
| Rok vydání: |
2023 |
| Zdroj: |
Atwa, Y & Shakeel, H 2023, Manufacture of hemi-spherical resonators using printable fused silica glass . in Proceedings of the 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023 . International Symposium on Inertial Sensors and Systems (ISISS): Proceedings, Institute of Electrical and Electronics Engineers Inc., 10th International Symposium on Inertial Sensors and Systems, IEEE INERTIAL 2023, Lihue, United States, 28/03/2023 . https://doi.org/10.1109/INERTIAL56358.2023.10103948 |
| DOI: |
10.1109/inertial56358.2023.10103948 |
| Popis: |
In this paper, we present a new method for manufacturing millimeter-sized three-dimensional (3D) hemi-spherical resonators (HSRs) using a printable fused silica (FS) glass suspension. Our manufacturing process involves a combination of 3D printing, replication molding and casting steps to produce a complex FS-based HSR geometry. As proof of concept, we made a 9.5 mm-diameter and 0.5mm-thick resonator that was coated with thin films of chromium and gold (132nm). We tested the resonator using electrostatic actuation and detection methods and were able to detect a single resonance mode at 6.74 kHz with an experimental quality factor of approximately 1,540. This manufacturing method is easy to use and yields high results (greater than 95%), but it does require further optimization to improve device performance due to relatively high surface roughness. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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