Development of a Compact X-ray Source and Super-sensitization of Photo Resists for Soft X-ray Imaging
| Autor: | Tomoko Gowa, Naoyuki Fukutake, Yoshimasa Hama, Kentaro Hizume, Takashi Kashino, Shigeru Kashiwagi, Ryunosuke Kuroda, Akihiko Masuda, Akihiro Ohshima, Taku Saito, Kazuyuki Sakaue, Kunio Shinohara, Tomohiro Takashi, Tatsuya Urakawa, Kiminori Ushida, Masakazu Washio |
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| Rok vydání: | 2009 |
| Předmět: | |
| Zdroj: | ResearcherID |
| ISSN: | 1349-6336 0914-9244 |
| DOI: | 10.2494/photopolymer.22.273 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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