Extreme ultraviolet performance of a multilayer coated high density toroidal grating
| Autor: | Jeffrey S. Gum, Werner M. Neupert, Roger J. Thomas, Ritva A. M. Keski-Kuha, Charles E. Condor |
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| Rok vydání: | 2010 |
| Předmět: |
Materials science
business.industry Materials Science (miscellaneous) Extreme ultraviolet lithography Physics::Optics Grating Diffraction efficiency Industrial and Manufacturing Engineering law.invention Optical coating Optics law Extreme ultraviolet Blazed grating Optoelectronics Business and International Management Spectral resolution business Diffraction grating |
| Zdroj: | Applied optics. 30(16) |
| ISSN: | 1559-128X |
| Popis: | The performance of a multilayer coated diffraction grating has been evaluated at EUV wavelengths both in terms of absolute efficiency and spectral resolution. The application of a ten-layer Ir/Si multilayer coating to a 3600-lines/mm blazed toroidal replica grating produced a factor of 9 enhancement in peak efficiency near the design wavelength approximately 30 nm in first order, without degrading its excellent quasistigmatic spectral resolution. The measured EUV efficiency peaked at 3.3% and was improved over the full spectral range between 25 and 35 nm compared with the premultilayer replica which had a standard gold coating. In addition, the grating's spectral resolution of >5000 was maintained. |
| Databáze: | OpenAIRE |
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