Modeling and validation of acoustic performances of micro-acoustic sources for hearing applications
| Autor: | Skandar Basrour, Aurelio Soma, Libor Rufer, Giorgio De Pasquale |
|---|---|
| Přispěvatelé: | Politecnico di Torino = Polytechnic of Turin (Polito), Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés (TIMA), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Politecnico di Torino [Torino] (Polito), Techniques of Informatics and Microelectronics for integrated systems Architecture (TIMA), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA) |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
Fabrication
Materials science Acoustics Microfluidics Flow (psychology) 02 engineering and technology Signal 0203 mechanical engineering Electrical and Electronic Engineering [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Sound pressure Instrumentation Experimental micromechanics FEM MEMS-CMOS Metals and Alloys Process (computing) 021001 nanoscience & nanotechnology Condensed Matter Physics Finite element method Surfaces Coatings and Films Electronic Optical and Magnetic Materials 020303 mechanical engineering & transports PACS 8542 Diaphragms 0210 nano-technology DC bias |
| Zdroj: | Sensors and Actuators A: Physical Sensors and Actuators A: Physical, Elsevier, 2016, 247, pp.614-618. ⟨10.1016/j.sna.2016.06.015⟩ |
| ISSN: | 0924-4247 1873-3069 |
| Popis: | International audience; We report on a micro-acoustic source based on industrial 0.35 μm CMOS-MEMS process with only one additional post-process step. The fabrication flow completed with the characterization results of an electrostatic micro-acoustic source based on 0.35 μm CMOS process with sacrificial SiO2 etch is shown here for the first time. The acoustic pressure in air in the vicinity of the resonant frequency (32 kHz) at the distance of 10 mm from the source was measured. The acoustic pressure of 12 mPa was obtained when the source was driven by an AC signal of 6 VAC and a DC bias of 8 VDC. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect