Thin film strain gauges on polymers: main characteristics

Autor: H. Grange, S. Renard, C. Bieth, G. Delapierre, C. Maeder
Rok vydání: 1995
Předmět:
Zdroj: Sensors and Actuators A: Physical. 46:213-217
ISSN: 0924-4247
DOI: 10.1016/0924-4247(94)00892-l
Popis: We present a new technology to realize thin film strain gauges on polymer films by cathodic sputtering. We show that high resistance values on small surfaces (>1000 Ω mm −2 ) are feasible and we propose a new method to compensate for the test structure creep. Thanks to an adequate combination of thin film materials (NiCrSi and CuNiMn), accurate weighing measurements ( −4 of the full scale of the sensor) are obtained without needing to change the gauge geometry.
Databáze: OpenAIRE