| Autor: |
Gukhyeon Hwang, Inho Choi, Sukhyun Choi, Saeid Kheiryzadehkhanghah, Won Chegal, Sungtae Kim, Sangjun Kim, Robert Magnusson, Daesuk Kim |
| Rok vydání: |
2023 |
| Předmět: |
|
| Zdroj: |
Optics Express. 31:19569 |
| ISSN: |
1094-4087 |
| Popis: |
We describe a robust dynamic spectroscopic imaging ellipsometer (DSIE) based on a monolithic Linnik-type polarizing interferometer. The Linnik-type monolithic scheme combined with an additional compensation channel solves the long-term stability problem of previous single-channel DSIE. The importance of a global mapping phase error compensation method is also addressed for accurate 3-D cubic spectroscopic ellipsometric mapping in large-scale applications. To evaluate the effectiveness of the proposed compensation method for enhancing system robustness and reliability, a whole thin film wafer mapping is conducted in a general environment where various external disturbances affect the system. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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