Development and manufacture of high-sensitivity SPR sensors based on Au/niobium oxide thin-film structures
| Autor: | Yurii Frolov, Pavlo Shpylovyy, Tetyana Lebyedyeva, Mykola Budnyk |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Thermal oxidation Materials science business.industry Niobium chemistry.chemical_element 02 engineering and technology engineering.material 021001 nanoscience & nanotechnology 01 natural sciences Coating chemistry 0103 physical sciences Cavity magnetron engineering Optoelectronics Niobium oxide Thin film 0210 nano-technology business Layer (electronics) Biosensor |
| Zdroj: | 2020 IEEE 40th International Conference on Electronics and Nanotechnology (ELNANO). |
| DOI: | 10.1109/elnano50318.2020.9088900 |
| Popis: | The work is devoted to the creation of SPR sensors with increased sensitivity using a nano-dielectric layer of niobium oxide coating a gold film. The results of computer simulation of reflection curves, as well as the calculation of refractometric and biosensor sensitivity of SPR sensors with a change in the thickness of the Nb 2 O 5 layer are presented. In order to practically implement the sensor structures two thin-films process cycles were developed. The first one involves the formation of a ultra-thin layer of niobium on the gold surface with subsequent thermal oxidation, while the second involves the deposition of a layer of niobium oxide in DC magnetron plasma in a mixture of argon and oxygen. Experimental studies of manufactured sensor substrates have shown that the angular sensitivity of SPR measurements increases in accordance with theoretical calculations. It is shown that the angular sensitivity increases by 1.5 times at a thickness of 6 nm of the niobium oxide. Thus, the nano-dielectric layer of niobium oxide on the gold surface formed by means of thin-film vacuum technology makes it possible to obtain stable, chemically inert coatings for SPR sensors with noticeably higher sensitivity. |
| Databáze: | OpenAIRE |
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