Correlation between the structure, specific resistance, and optical properties of ITO films grown by CVD
| Autor: | Zh. Z. Shermatov, S. B. Zakirova, M. U. Khazhiev, I. G. Atabaev |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science Renewable Energy Sustainability and the Environment High conductivity business.industry chemistry.chemical_element 02 engineering and technology Chemical vapor deposition 021001 nanoscience & nanotechnology 01 natural sciences chemistry 0103 physical sciences Optoelectronics Vaporizer 0210 nano-technology business Tin Layer (electronics) Indium Specific resistance |
| Zdroj: | Applied Solar Energy. 53:322-325 |
| ISSN: | 1934-9424 0003-701X |
| DOI: | 10.3103/s0003701x1704003x |
| Popis: | By means of chemical vapor deposition (CVD) in a quasi-closed space with the use of a separate vaporizer, indium and tin oxides (ITOs)/glass structures with high conductivity and transparency and a thickness of up to 3 μm are obtained; they are suitable for the manufacture of protective coatings of mirrors with a reflecting facial layer. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full text from SpringerLink