High density V-GAA transistor structure array based on self-aligned double patterning

Autor:	Xingsong Su, Yunsong Qiu, Mengkang Yu, GuangSu Shao, Hongbo Sun, Weiping Bai, Deyuan Xiao, Kanyu Cao, Ted Park
Rok vydání:	2021
Zdroj:	2021 International Workshop on Advanced Patterning Solutions (IWAPS).
DOI:	10.1109/iwaps54037.2021.9671059
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fb41701eade30077bbf5952e272cfe45 https://doi.org/10.1109/iwaps54037.2021.9671059 Zobrazit plný text záznamu