Improvement of Al thin film morphology with picosecond pulsed laser deposition in burst mode

Autor:	Jingjing Meng, Enli Wu, Yang Liu, Shoujun Dai, Mo Zeqiang, He Jianguo, Jin Yu
Rok vydání:	2021
Předmět:	Picosecond pulsed laser Materials science business.industry General Engineering General Physics and Astronomy Optoelectronics business Thin film morphology Deposition (chemistry) Burst mode (computing)
Zdroj:	Applied Physics Express. 14:075501
ISSN:	1882-0786 1882-0778
DOI:	10.35848/1882-0786/ac05d9
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f87e6aee6b8e6b85ca7c82e01a3b6a12 https://doi.org/10.35848/1882-0786/ac05d9 Zobrazit plný text záznamu