Flash-evaporated TiNiCu thick film for shape memory alloy micro actuator
| Autor: | Takahiro Kawashima, Takashi Mineta, Yuki Sasaki, Kouji Kasai, Takayuki Shibata, Eiji Makino |
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| Rok vydání: | 2009 |
| Předmět: |
Microelectromechanical systems
Materials science Micro actuator chemistry.chemical_element Shape-memory alloy Condensed Matter Physics Copper Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Flash (manufacturing) Spring (device) Forensic engineering Electrical and Electronic Engineering Composite material Actuator |
| Zdroj: | Microelectronic Engineering. 86:1274-1277 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2008.12.032 |
| Popis: | In order to realize flexible micro actuators with a high operational force, TiNiCu shape memory alloy (SMA) films with thickness exceeding [email protected] were fabricated by flash-evaporation. The addition of a small amount of copper to the films with TiNi main composition provided fine and compact crystallographic structures followed by high flexibility, while actuation force increased with increasing thickness. These thick films will be applied to medical MEMS devices, such as active catheters and meandering spring actuators. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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