Deep purification of hexamethyldisilazane
Autor: | M. V. Ryabtseva, E. E. Grinberg, V. I. Ukhin, I. E. Strel’nikova, Yu. I. Levin, V. I. Rakhlin |
---|---|
Rok vydání: | 2011 |
Předmět: | |
Zdroj: | Russian Journal of Applied Chemistry. 84:1909-1913 |
ISSN: | 1608-3296 1070-4272 |
Popis: | We considered a deep cleaning of 1,1,1,3,3,3-hexamethyldisilazane used in microelectronics and organoelement synthesis from a series of homogeneous and heterogeneous admixtures by various physicochemical methods. |
Databáze: | OpenAIRE |
Externí odkaz: |