Deep purification of hexamethyldisilazane

Autor:	M. V. Ryabtseva, E. E. Grinberg, V. I. Ukhin, I. E. Strel’nikova, Yu. I. Levin, V. I. Rakhlin
Rok vydání:	2011
Předmět:	Chromatography Chemical engineering Homogeneous Chemistry business.industry General Chemical Engineering Microelectronics General Chemistry business
Zdroj:	Russian Journal of Applied Chemistry. 84:1909-1913
ISSN:	1608-3296 1070-4272
Popis:	We considered a deep cleaning of 1,1,1,3,3,3-hexamethyldisilazane used in microelectronics and organoelement synthesis from a series of homogeneous and heterogeneous admixtures by various physicochemical methods.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f5398649e59dd931cbfbb4ff8d83e5c4 https://doi.org/10.1134/s1070427211110127 Zobrazit plný text záznamu Full text from SpringerLink