P-80: A Study about the Metal Corrosion and Diffusion Phenomenon in Cu-Mo Dual Layer Metal Wires for TFT-LCDs

Autor:	Yue Wu, Yuan Xiong, Chunsheng Jiang, Shimin Ge, Shan Li
Rok vydání:	2017
Předmět:	010302 applied physics Materials science Diffusion Metallurgy Dual layer 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Corrosion Metal Thin-film transistor visual_art 0103 physical sciences visual_art.visual_art_medium 0210 nano-technology
Zdroj:	SID Symposium Digest of Technical Papers. 48:1543-1545
ISSN:	0097-966X
DOI:	10.1002/sdtp.11944
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f534861543ebce0aac5a9de6a72710dd https://doi.org/10.1002/sdtp.11944 Zobrazit plný text záznamu Plný text