INFLUENCE OF PARAMETERS OF ION FLOW ON THE STRUCTURE AND PROPERTIES OF COATINGS OF Α-ALUMINUM OXIDE OBTAINED IN THE ARC DISCHARGE ANODE REACTIVE EVAPORATION ION C SUPPORT
| Autor: | A. S. Kamenetskyh, A. V. Chukin, P. V. Tretnikov, N. V. Gavrilov |
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| Rok vydání: | 2018 |
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| Zdroj: | Plasma emission electronics. |
| DOI: | 10.31554/978-5-7925-0524-7-2018-126-133 |
| Databáze: | OpenAIRE |
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