An Improved Reynolds-Equation Model for Gas Damping of Microbeam Motion
| Autor: | Michail A. Gallis, John Robert Torczynski |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Physics
Mechanical Engineering Monte Carlo method Fluid mechanics Mechanics Microbeam Slip (materials science) Reynolds equation Computer Science::Other Physics::Fluid Dynamics Physics::Accelerator Physics Direct simulation Monte Carlo Boundary value problem Electrical and Electronic Engineering Navier–Stokes equations |
| Zdroj: | Journal of Microelectromechanical Systems. 13:653-659 |
| ISSN: | 1057-7157 |
| DOI: | 10.1109/jmems.2004.832194 |
| Popis: | An improved gas-damping model for the out-of-plane motion of a near-substrate microbeam is developed based on the Reynolds equation (RE). A boundary condition for the RE is developed that relates the pressure at the beam edge to the beam motion. The coefficients in this boundary condition are determined from Navier-Stokes slip-jump (NSSJ) simulations for small slip lengths (relative to the gap height) and from direct simulation Monte Carlo (DSMC) molecular gas dynamics simulations for larger slip lengths. This boundary condition significantly improves the accuracy of the RE when the microbeam width is only slightly greater than the gap height between the microbeam and the substrate. The improved RE model is applied to microbeams fabricated using the SUMMiT V process. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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