Sensors and actuators based on SOI materials
| Autor: | Anke Sanz-Velasco, Stefan Bengtsson, Peter Enoksson, Martin Bring, Karin Hedsten, Alexandra Nafari, Henrik Rödjegård |
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| Rok vydání: | 2006 |
| Předmět: |
Materials science
Silicon business.industry chemistry.chemical_element Silicon on insulator Nanoindentation Condensed Matter Physics Accelerometer Force sensor Electronic Optical and Magnetic Materials chemistry Materials Chemistry Electronic engineering Optoelectronics ComputerSystemsOrganization_SPECIAL-PURPOSEANDAPPLICATION-BASEDSYSTEMS Electrical and Electronic Engineering Actuator business |
| Zdroj: | Solid-State Electronics. 50:865-876 |
| ISSN: | 0038-1101 |
| DOI: | 10.1016/j.sse.2006.04.026 |
| Popis: | Examples of using SOI materials for formation of novel sensor and actuator structures at Chalmers University of Technology are given. Using SOI material gives advantages in formation of sensor and actuator structures, such as a nanoindentation force sensor, a three-axis accelerometer, a miniaturized pinball game and integration of diffractive optical elements onto silicon. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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