Nano planar coil actuated micro paddle resonator for mass detection
| Autor: | Christopher A. E. Hamlett, S.Chitsaz Charandabi, Jon A. Preece, Philip D. Prewett, Carl J. Anthony |
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| Rok vydání: | 2011 |
| Předmět: |
Materials science
business.industry Analytical chemistry Microcoil Condensed Matter Physics Piezoelectricity Focused ion beam Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Inductance Resonator Electromagnetic coil Optoelectronics Paddle Shaker Electrical and Electronic Engineering business |
| Zdroj: | Microelectronic Engineering. 88:2229-2232 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2011.02.086 |
| Popis: | A torsional paddle microresonator has been conceived, designed and fabricated to first prototype level. It has demonstrated mass sensitivity that gives the potential for the detection of a range of biowarfare agents ranging from bacterial and other pathogens to the VOCs associated with explosives. This current work reports progress towards the implementation of a Lorentz force electromagnetic actuation system for the resonator, in place of the previously used piezoelectric shaker. A double planar spiral microcoil has been designed to be integrated with the micropaddle and has been prototyped using focused ion beam processing. Its mechanical effect upon the performance of the paddle has been investigated and its electromagnetic characteristics simulated using FEA. The coil self inductance was calculated to be 1.54x10^-^1^0H. |
| Databáze: | OpenAIRE |
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