Impedance spectroscopy of porous silicon layers
Autor: | Vitaly Starkov, Ekaterina Gosteva, Andrey S. Shportenko, Vladimir Volkov |
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Rok vydání: | 2021 |
Předmět: | |
Zdroj: | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO). |
Popis: | The features of the behavior of the impedance characteristics of porous silicon layers are studied. |
Databáze: | OpenAIRE |
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