Impedance spectroscopy of porous silicon layers

Autor: Vitaly Starkov, Ekaterina Gosteva, Andrey S. Shportenko, Vladimir Volkov
Rok vydání: 2021
Předmět:
Zdroj: 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO).
Popis: The features of the behavior of the impedance characteristics of porous silicon layers are studied.
Databáze: OpenAIRE