Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant
| Autor: | Shao Yongbo, Wang Yang, Wang Wei, Zhao Lingjuan, Zhou Daibing, Liang Song, Qiu Yingping |
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| Rok vydání: | 2011 |
| Předmět: |
Fabrication
Materials science Extinction ratio business.industry RC time constant Condensed Matter Physics Capacitance Electronic Optical and Magnetic Materials Optics Electro-absorption modulator Materials Chemistry Undercut Electrical and Electronic Engineering business Absorption (electromagnetic radiation) Voltage |
| Zdroj: | Journal of Semiconductors. 32:105002 |
| ISSN: | 1674-4926 |
| DOI: | 10.1088/1674-4926/32/10/105002 |
| Popis: | A novel lumped electro-absorption modulator with a charge layer and an undercut ridge waveguide (DU-EAM) was fabricated and measured. Also, two other kinds of EAM with straight ridge waveguides, one with a charge layer (D-EAM) and another with no charge layer (N-EAM), were fabricated and tested to ensure that the design of the DU-EAM would reduce the RC-time constant. The measured capacitance of the D-EAM and the DU-EAM is lower than that of the N-EAM under reverse bias voltage from −1 to −8 V due to the inserted charge layer. The capacitances of the N-EAM, the D-EAM and the DU-EAM are 0.375, 0.225 and 0.325 pF, respectively, at −3 V. In addition, the DU-EAM had a larger extinction ratio (25 dB at −3 V) and higher modulation efficiency (13 dB/V between −1 and −2 V) than two other straight-ridge-waveguide ones (the D-EAM performed 22 dB and 10 dB/V, the N-EAM performed 20 dB and 10 dB/V) due to the 5.2 μm wider active region. |
| Databáze: | OpenAIRE |
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