Process Modeling as a Powerful Semiconductor Industry Tool: PVD of W as Case Study
| Autor: | Piyush Bhatt, Wei Lei, Shirish Pethe, Rajesh Sathiyanarayanan, Phillip Stout |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 IEEE International Conference on Emerging Electronics (ICEE). |
| DOI: | 10.1109/icee56203.2022.10117770 |
| Databáze: | OpenAIRE |
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