Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing
| Autor: | Xueshuai Jiao, Su-Mei Wang, Jinhua Zhao, Jin-Jun Gu, Lei Wang, Ming-Yang Bu, Yingying Ren |
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| Rok vydání: | 2021 |
| Předmět: |
Fabrication
Materials science business.industry Diamond blade Lithium niobate Physics::Optics Diamond engineering.material Fluence Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention chemistry.chemical_compound Optics Planar chemistry law engineering Wafer dicing Electrical and Electronic Engineering business Waveguide |
| Zdroj: | Chinese Optics Letters. 19:060009 |
| ISSN: | 1671-7694 |
| DOI: | 10.3788/col202119.060009 |
| Popis: | We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm. To obtain a planar waveguide, oxygen ions with an energy of 3.0 MeV and a fluence of 1.5×1015 ions/cm2 are implanted in the polished face of LiNbO3 crystals. For planar waveguides, a loss of 0.5 dB/cm is obtained after annealing at 300°C for 30 min. The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides. The guiding properties are investigated by prism coupling and end-face coupling methods. |
| Databáze: | OpenAIRE |
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