Design and Analytical Studies of a DLC Thin-Film Piezoresistive Pressure Microsensor
| Autor: | Gabriela Leal, Marcos Massi, Leandro L. Koberstein, Humber Furlan, Mariana A. Fraga, Luiz Antonio Rasia |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Wheatstone bridge Materials science Silicon business.industry Circular diaphragm chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Piezoresistive effect Pressure sensor law.invention chemistry law 0103 physical sciences Optoelectronics Thin film 0210 nano-technology business Piezoresistive pressure sensors |
| Zdroj: | Communications in Computer and Information Science ISBN: 9783319669625 WEA |
| Popis: | Diamond-like carbon (DLC) thin films have been investigated for a wide range of applications due to their excellent electrical and mechanical properties. In the last decade, several researches and development activities have been conducted on the use of these thin films as piezoresistors in MEMS pressure sensors. This paper provides an overview on the design of a piezoresistive pressure sensor constituted of a silicon circular diaphragm with four DLC thin-film piezoresistors arranged in the Wheatstone bridge configuration. The sensor was designed from analytical formulas found in the literature. |
| Databáze: | OpenAIRE |
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