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S. Schwartz, R. T. Jennings, J. F. Kimmons, R. P. Mouser, C. L. WeinzapfelM. R. Kozlowski, C. J. Stolz, J. H. CampbellLawrence Livermore National LaboratoryP.O. Box 808, L-496Livermore, CA 9455 1-0808ABSTRACTA sizable laser damage metrology effortis required as part of optics production and installation for the 192 beam Nationalignition Facility (NIF) laser. The large quantities, high damage thresholds, and large apertures of polished and coated opticsnecessitates vendor-based metrology equipment to assure component quality during production. This equipment must beoptimized to provide the required information as rapidly as possible with limited operator experience. The damage metrologytools include: I) platinum inclusion damage test systems for laser amplifier slabs, 2) laser conditioning stations for mirrorsand polarizers, and 3) mapping and damage testing stations for UV transmissive optics. Each system includes a commercialNd:YAG laser, a translation stage for the optics, and diagnostics to evaluate damage. The scanning parameters, opticallayout, and diagnostics vary with the test fluences required and the damage morphologies expected. This paper describes thetechnical objectives and milestones involved in fulfilling these metrology requirements at multiple vendors.KEYWORD LISTLaser damage, laser damage metrology, NIF metrology, National Ignition Facility, large area conditioning, laser glass |