High resolution imaging microellipsometry of soft surfaces at 3 μm lateral and 5 Å normal resolution

Autor:	G. Mathe, P. Paduschek, Erich Sackmann, K. R. Neumaier, A. Albersdörfer, G. Elender
Rok vydání:	1998
Předmět:	chemistry.chemical_classification Brewster's angle Materials science Physics and Astronomy (miscellaneous) business.industry Resolution (electron density) Polymer symbols.namesake Optics chemistry Ellipsometry symbols Wafer Transient (oscillation) Dewetting business High resolution imaging
Zdroj:	Applied Physics Letters. 72:2930-2932
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.121497
Popis:	We report on the design of an imaging microellipsometer enabling the generation of maps of the two ellipsometric angles Δ and Ψ. Areas of 60×200 μm2 are imaged at a rate of 1–2 images per minute. By working at angles (45°) much smaller than the Brewster angle (≈73° for Si/SiO2/air) a lateral resolution of 3 μm and a height resolution of 5 A is achieved. The performance is demonstrated by thickness measurement of a laterally structured polymer film and a transient thickness measurement of dewetting fluid film of n-hexadecane on a Si/SiO2 wafer.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e8c5d0f4b7f466b27aa04a209f5e6042 https://doi.org/10.1063/1.121497 Zobrazit plný text záznamu