Texturing of SiC-slurry and diamond wire sawn silicon wafers by HF–HNO3–H2SO4 mixtures

Autor:	Florian Buchholz, Edwin Kroke, Florian Honeit, Marcus Lippold, Eckard Wefringhaus, Christoph Gondek
Rok vydání:	2014
Předmět:	Materials science Silicon Renewable Energy Sustainability and the Environment Metallurgy Diamond chemistry.chemical_element engineering.material Surfaces Coatings and Films Electronic Optical and Magnetic Materials Crystallography chemistry Etching (microfabrication) engineering Slurry Wafer Reactivity (chemistry) Reactive-ion etching
Zdroj:	Solar Energy Materials and Solar Cells. 127:104-110
ISSN:	0927-0248
Popis:	The reactivity of HF(40 wt%)–HNO3(100 wt%)–H2SO4(97 wt%) etching mixtures towards conventional SiC-slurry and diamond-wire sawn silicon wafers has been studied. Sulfuric acid-rich mixtures exhibit adequate etching rates (r
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e874fdfc6f899dd7e75dc99525b019b5 https://doi.org/10.1016/j.solmat.2014.04.006 Zobrazit plný text záznamu Full Text from ScienceDirect