Epitaxial HTS thin films grown by PLD with a beam homogenizer
| Autor: | S.M. Green, A. Koch, F.X. Wagner, H. Endert, L.A. Knauss, Hans M. Christen, Michael Scaggs, K. S. Harshavardhan |
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| Rok vydání: | 1998 |
| Předmět: |
Materials science
business.industry General Physics and Astronomy Mineralogy Yba2cu3o7 δ Surfaces and Interfaces General Chemistry Condensed Matter Physics Epitaxy Laser Surfaces Coatings and Films Pulsed laser deposition law.invention law Optoelectronics Thin film business Particle density Beam homogenizer |
| Zdroj: | Applied Surface Science. :477-480 |
| ISSN: | 0169-4332 |
| Popis: | A beam homogenizer has been used in combination with a standard pulsed laser deposition (PLD) system. This combination reproducibly resulted in laser spots of precisely predetermined shapes and energy densities, thus providing control over one of the most difficult parameters in PLD. Thin films of YBa 2 Cu 3 O 7− δ (YBCO) were grown on LaAlO 3 substrates, and the new possibilities arising from the excellent control over the laser spot parameters were explored. Films with high transition temperatures ( T c ≈90 K, T c ≈0.5 K) and smooth surfaces were obtained. It has been shown that target wear is greatly reduced, resulting in significantly increased lifetime of the target and possibly reduced particle density on the films. |
| Databáze: | OpenAIRE |
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