Features of Electromagnetic Field Excitation in a Capacitive HF Discharge. I. General Aspects. A Simple Model of Symmetric Discharge

Autor: Sergey Dvinin, Oleg A. Sinkevich, D. K. Solikhov, Zafari Kodirzoda
Rok vydání: 2020
Předmět:
Zdroj: Plasma Physics Reports. 46:1181-1204
ISSN: 1562-6938
1063-780X
DOI: 10.1134/s1063780x20120028
Popis: Electrodynamic properties of a low-pressure (electron collision frequency much lower than the field frequency) capacitive high-frequency (HF) discharge with large-area electrodes maintained by an electromagnetic field with frequency higher than 13 MHz is studied analytically. The discharge is sustained by surface waves propagating along the plasma–space-charge sheath–metal interface. When describing the sheath, dispersion curves for even and odd surface waves in a three-layer structure (sheath–plasma–sheath) surrounded by metal boundaries are calculated within the framework of the matrix model. It is demonstrated that the field of the fundamental mode (the quasi-TEM mode) must be taken into account for correct discharge impedance calculation in the case of low electron densities, while the field of the surface wave must be taken into account in the case of high electron densities. An approximate expression governing the discharge impedance that is based on accounting only for one mode is derived. The expression is valid at low electron densities when the surface waves are absent, as well as high electron densities exceeding the value giving rise to a geometric resonance in the plasma–sheath system.
Databáze: OpenAIRE
Externí odkaz:
Nepřihlášeným uživatelům se plný text nezobrazuje