Development and experimental characterization of micromachined electromagnetic probes for biological manipulation and stimulation applications
| Autor: | A.E. Ozmetin, Murat Kaya Yapici, Donald G. Naugle, Jun Zou |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
Permalloy
Scanning Hall probe microscope Materials science Fabrication Field (physics) Metals and Alloys Nanotechnology Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Characterization (materials science) Surface micromachining Electromagnetic coil Magnetic nanoparticles Electrical and Electronic Engineering Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 144:213-221 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2007.12.029 |
| Popis: | We present the design, fabrication and experimental characterization of a new micromachined electromagnetic probe, which can be readily adapted to various biological manipulation and stimulation applications. The micro electromagnetic probe consists of a protruding (out-of-chip), sharp Permalloy needle embedded into a three-dimensional gold conducting coil. The probe fabrication is carried out using traditional surface micromachining processes coupled with assembly techniques. This hybrid approach significantly reduces fabrication difficulties and provides a simple and straightforward technique to realize integrated core-coil geometries. Furthermore, by using a scanning Hall probe microscope (SHPM), a comprehensive, high-spatial resolution characterization of the probe performance (e.g. peak magnetic intensity and spatial field distribution) is achieved for the first time. The manipulation of sub-micron sized magnetic particles with the developed micro electromagnetic probe is also demonstrated. |
| Databáze: | OpenAIRE |
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