Investigation of charge transfer interaction in heterometallic precursors to control their surface reactivity for MOCVD of Pd-Cu alloy films
| Autor: | Natalia A. Kryuchkova, V. V. Krisyuk, Mikhail M. Syrokvashin, Andrey I. Stadnichenko |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Materials science
General Physics and Astronomy Charge density 02 engineering and technology Surfaces and Interfaces General Chemistry Electronic structure 010402 general chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics Elementary charge 01 natural sciences 0104 chemical sciences Surfaces Coatings and Films Metal X-ray photoelectron spectroscopy visual_art visual_art.visual_art_medium Physical chemistry 0210 nano-technology Bimetallic strip Natural bond orbital Electronic density |
| Zdroj: | Applied Surface Science. 547:149068 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2021.149068 |
| Popis: | The work aims to study main factors determining surface reactions mechanism of the heterometallic MOCVD precursors for multicomponent inorganic films. A set of theoretical and experimental techniques is proposed to investigate the electronic structure of the copper-palladium precursor to control its surface reactivity in MOCVD of Pd-Cu alloy films. The surface and bulk charge distribution in the heterometallic precursors CuPdL4 (1) and Cu(hfa)2PdLF2 (2) and parent monometallic complexes was carried out using both experimental X-ray photoelectron (XPS) and X-ray emission (XES) spectroscopies and theoretical techniques (DFT calculations and NBO analysis). Comparison of calculated and experimental atomic charges for monometallic and heterometallic complexes revealed the electronic density redistribution on oxygen and metal atoms due to electronic charge transfer interaction between monometallic fragments in the heterocomplex, which was confirmed by NBO analysis. The charge transfer intensity appeared to be stronger for the fluorinated precursor 2, indicating its greater resistance to thermal dissociation into monometallic fragments compared to 1, which was confirmed by the data on the bimetallic films composition. Thus, the evidenced charge transfer interaction can be altered by changing the composition of the precursors to control their surface reactivity and films composition. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect