Crystallization of a-Si films deposited by RF sputtering using blue direct diode laser
| Autor: | Mitsuoki Hishida, Naohiko Kobata, Kentaro Miyano, Hiroaki Suzuki, Masaki Nobuoka, Tatsuya Okada, Takashi Noguchi |
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| Rok vydání: | 2023 |
| Zdroj: | Laser-based Micro- and Nanoprocessing XVII. |
| DOI: | 10.1117/12.2651151 |
| Databáze: | OpenAIRE |
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