Low thermal budget fabrication of poly-Ge1-xSnx thin film thermoelectric generator

Autor: Hiroshi Ikenoue, Mitsuo Sakashita, Shigeaki Zaima, Kouta Takahashi, Osamu Nakatsuka, Masashi Kurosawa
Rok vydání: 2018
Předmět:
Zdroj: 2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM).
DOI: 10.1109/edtm.2018.8421488
Popis: We have investigated thermoelectric (TE) properties of poly-Ge}_{1-x}Sn}_{x} layers prepared with pulsed laser annealing in water. Even for polycrystalline layers, relatively high power factors of 0.37 and 0.92 mWK−2m−1 were obtained for p- and n-type poly-Ge}_{1-x}Sn}_{x} layers, respectively. The Ge}_{1-x}Sn}_{x}-based TE generator has been firstly fabricated blow the process temperature of 300 °C.
Databáze: OpenAIRE