Annealing effects on the optical and electrochemical properties of tantalum pentoxide films

Autor:	Ren Wei, Rui-Xia Miao, Guang-Dao Yang, Jun-Bo Xia, Ailing Feng, Yong-Gang Wang
Rok vydání:	2021
Předmět:	Materials science Annealing (metallurgy) Band gap Electron beam physical vapor deposition Electronic Optical and Magnetic Materials Amorphous solid chemistry.chemical_compound Chemical engineering chemistry Tantalum pentoxide Ceramics and Composites Transmittance Crystallite Thin film
Zdroj:	Journal of Advanced Ceramics. 10:704-713
ISSN:	2227-8508 2226-4108
DOI:	10.1007/s40145-021-0465-2
Popis:	Tantalum pentoxide (Ta2O5) has attracted intensive attention due to their excellent physicochemical properties. Ta2O5 films were synthesized via electron beam evaporation (EBE) and subsequently annealed at different temperatures ranging from 300 to 900 °C. X-ray diffraction (XRD) results show that amorphous Ta2O5 thin films form from 300 to 700 °C and then a phase transition to polycrystalline β-Ta2O5 films occurs since 900 °C. The surface morphology of the Ta2O5 films is uniform and smooth. The resulted Ta2O5 films exhibit excellent transmittance properties for wavelengths ranging from 300 to 1100 nm. The bandgap of the Ta2O5 films is broadened from 4.32 to 4.46 eV by annealing. The 900 °C polycrystalline film electrode has improved electrochemical stability, compared to the other amorphous counterparts.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e2ea0c18c368e73e7c91c336b883fc02 https://doi.org/10.1007/s40145-021-0465-2 Zobrazit plný text záznamu Full text from SpringerLink