A Resonantly-Driven Piezoelectric Micropump Using Active-Type Check Valves : Investigations on load characteristics and miniaturization

Autor: Takeshi Seto, Jung-Ho Park, Chikara Ishikawa, Shinichi Yokota, Kunihiko Takagi, Kazuhiro Yoshida
Rok vydání: 2003
Předmět:
Zdroj: The Proceedings of the Machine Design and Tribology Division meeting in JSME. :77-80
ISSN: 2424-3051
DOI: 10.1299/jsmemdt.2003.3.77
Databáze: OpenAIRE