Fabrication of a diffusion cooled superconducting hot electron bolometer for THz mixing applications
| Autor: | B. Bumble, H.G. LeDuc |
|---|---|
| Rok vydání: | 1997 |
| Předmět: |
Fabrication
Materials science Terahertz radiation business.industry Bolometer Niobium chemistry.chemical_element Condensed Matter Physics Electronic Optical and Magnetic Materials law.invention chemistry Intermediate frequency law Optoelectronics Dipole antenna Electrical and Electronic Engineering Thin film business Electron-beam lithography |
| Zdroj: | IEEE Transactions on Appiled Superconductivity. 7:3560-3563 |
| ISSN: | 1051-8223 |
| DOI: | 10.1109/77.622167 |
| Popis: | Recent interest in bolometers for heterodyne mixing applications has prompted development of microbridges which are small enough to allow electron diffusion to dominate over electron-phonon interaction as a cooling mechanism. Prior results at 533 GHz have demonstrated several GHz intermediate frequency (IF) bandwidth. Here we describe our processing method in which the bolometer element is a 10 nm thin film of niobium defined by electron beam lithography down to dimensions of 80 nm. This microbridge is embedded in a normal metal (Au) antenna structure for 1.2 and 2.5 THz applications. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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