Investigate the heat conduction between film and substrate during sputtering process by multi-layer structure NiCr/NiSi film thermocouples

Autor:	Zhihui Liu, Qizhen Wang, Xin Zhang, Bo Xing, Yumeng Yang, Hualin Wang, Weiwei Jiang, Yunxian Cui, Wanyu Ding
Rok vydání:	2023
Předmět:	Mechanics of Materials Mechanical Engineering Materials Chemistry Metals and Alloys
Zdroj:	Journal of Alloys and Compounds. 941:169020
ISSN:	0925-8388
DOI:	10.1016/j.jallcom.2023.169020
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::de5f27276f06266ea49118de28a7be59 https://doi.org/10.1016/j.jallcom.2023.169020 Zobrazit plný text záznamu Full Text from ScienceDirect