The deposition of niobium, NbN and Nb2O5 films by filtered arc evaporation
| Autor: | Avi Bendavid, G. J. Sloggett, C. Andrikidis, T.J. Kinder, Phil J. Martin, R.P. Netterfield |
|---|---|
| Rok vydání: | 1993 |
| Předmět: |
chemistry.chemical_classification
Materials science Metallurgy Inorganic chemistry Niobium chemistry.chemical_element Crystal growth Evaporation (deposition) Arc (geometry) chemistry Transition metal Electrical resistivity and conductivity Deposition (phase transition) General Materials Science Inorganic compound |
| Zdroj: | Journal of Materials Science Letters. 12:322-323 |
| ISSN: | 1573-4811 0261-8028 |
| DOI: | 10.1007/bf01910091 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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