E-beam direct write lithography: the versatile ally of optical lithography
| Autor: | Fabien Laulagnet, Jacques-Alexandre Dallery, Laurent Pain, Michael May, Béatrice Hemard, Franck Garlet, Isabelle Servin, Chiara Sabbione |
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| Rok vydání: | 2023 |
| Zdroj: | Novel Patterning Technologies 2023. |
| Databáze: | OpenAIRE |
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