Structure and electrical properties of SrBi2Ta2O9 thin films annealed in different atmosphere
| Autor: | Tao Yu, Nai-Ben Ming, Di Wu, Zhi-Gou Liu, Aidong Li, Huiqin Ling |
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| Rok vydání: | 2001 |
| Předmět: |
Diffraction
Argon Materials science Scanning electron microscope Crystal chemistry Mechanical Engineering chemistry.chemical_element Mineralogy Condensed Matter Physics Ferroelectricity Oxygen chemistry Chemical engineering Mechanics of Materials General Materials Science Lamellar structure Thin film |
| Zdroj: | Materials Letters. 49:303-307 |
| ISSN: | 0167-577X |
| DOI: | 10.1016/s0167-577x(00)00389-x |
| Popis: | Layered ferroelectric SBT films were prepared on Pt/TiO 2 /SiO 2 /Si substrates by metalorganic decomposition. The films were annealed in vacuum, argon, nitrogen and different ratios of N 2 /O 2 atmospheres to investigate the effect of annealing atmosphere on structural and ferroelectric properties of the films. X-ray diffraction, scanning electron microscopy and some electric measurements were used to determine the structure, morphology and ferroelectric properties of the films. It was found that oxygen plays an important role in SBT ferroelectric phase formation and has great effect on morphology and electric properties of the films. |
| Databáze: | OpenAIRE |
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