High-Frequency Micro Supercapacitors Based on High-Aspect-Ratio 3D Nanoporous Gold Interdigital Electrodes for On-Chip Filtering
| Autor: | Fan Xia, Xinyan Jia, Xiaohong Wang, Bingmeng Hu, Sixing Xu |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Supercapacitor Electrolytic capacitor Frequency response Materials science Nanoporous business.industry 02 engineering and technology Conductivity 021001 nanoscience & nanotechnology 01 natural sciences 0103 physical sciences Electrode Miniaturization Optoelectronics 0210 nano-technology business Electronic circuit |
| Zdroj: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). |
| DOI: | 10.1109/transducers.2019.8808275 |
| Popis: | Micro supercapacitor (MSC) featured by high capacity and superior frequency response, is a great candidate to replace bulky electrolytic capacitors in circuits for miniaturization. This paper presents a novel high-aspect-ratio three-dimensional(3D) nanoporous gold (NPG) interdigital electrode with thickness as high as 8 μm. The thick electrodes render the micro device an unprecedented high capacitance of 1.64 mF/cm2 for NPG based MSCs. Meanwhile, the electrodes remain excellent conductivity and porosity so that the MSC can efficiently operate at high frequency of 120 Hz or high charge/discharge rate of 500 V/s. Moreover, the on-chip device could be integrated and applied in a low-pass filtering circuit, showing great advantages compared with traditional electrolytic capacitors. |
| Databáze: | OpenAIRE |
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