| Autor: |
Myongseob Kim, Nick Yu-Min Shen, Edwin C. Kan, Zengtao Liu |
| Rok vydání: |
2003 |
| Předmět: |
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| Zdroj: |
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266). |
| DOI: |
10.1109/memsys.2002.984342 |
| Popis: |
This paper demonstrates, for the first time, electrostatic repulsion forces between two isolating beams as a viable actuation mechanism in MEMS applications by nonvolatile charge injection. Devices integrating MEMS beams and EEPROM structures have been fabricated and an actuation force of /spl sim/0.2 /spl mu/N has been recorded across a 3 /spl mu/m gap for beams 360 /spl mu/m in length. Larger actuation forces can be achieved through smaller gaps. A capacitor-network model is presented for analyzing such systems. This scheme holds promises in complimenting attractive electrostatic actuation and also finds valuable applications in achieving wear-free micro-bearings, hinges and turbines. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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