Broadband Optical Monitoring Combined with Additional Rate Measurement for Accurate and Robust Coating Processes
| Autor: | Stephan Waldner, Patrick Biedermann, Allan Jaunzens, Rico Benz |
|---|---|
| Rok vydání: | 2010 |
| Předmět: |
Materials science
business.industry Physics::Optics engineering.material Electron beam physical vapor deposition Condensed Matter::Materials Science Optical coating Coating Rate measurement Sputtering Robustness (computer science) Broadband Electronic engineering engineering Optoelectronics Thin film business |
| Zdroj: | Optical Interference Coatings. |
| DOI: | 10.1364/oic.2010.tuc10 |
| Popis: | We present a monitoring technique that combines broadband optical monitoring for accurate layer termination with quartz crystal monitoring ensuring the robustness of the process. Results both from sputter and electron beam evaporation tools are shown. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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