MEMS-based tunable filters for compact IR spectral imaging

Autor:	Hakan Durmas, Miikka Kangas, Min Xu, Jeffrey F. DeNatale, Robert L. Borwick, William E. Tennant, Paul H. Kobrin, William J. Gunning, Philip A. Stupar, Stefan Lauxtermann, Donald E. Cooper
Rok vydání:	2009
Předmět:	Microelectromechanical systems medicine.medical_specialty Materials science business.industry Physics::Optics Spectral response Chip Computer Science::Other Spectral imaging Imaging spectroscopy Optics Filter bandwidth Filter (video) medicine Optoelectronics business Optical filter
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
Popis:	Arrays of independently tunable MEMS Fabry-Perot filters have been developed that enable spectral tuning over the range of 11 - 8 microns with a filter bandwidth of ~ 120 nm. Actuation is provided using a MEMS driver IC that is hybridized to the MEMS chip. Combining the filter array with an IR FPA enables spatially-resolved spectral tuning in a compact architecture. Tunable spectral response data from the first integrated tunable filter / FPA device are presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d20e183b744350f89fc80db0603ad3a4 https://doi.org/10.1117/12.819017 Zobrazit plný text záznamu