Compact radio‐frequency glow‐discharge atomic hydrogen beam source

Autor: John A. B. Hodgson, Anthony A. Haasz
Rok vydání: 1991
Předmět:
Zdroj: Review of Scientific Instruments. 62:96-99
ISSN: 1089-7623
0034-6748
DOI: 10.1063/1.1142289
Popis: An atomic hydrogen beam source, compatible with ultrahigh vacuum and clean surface conditions, has been developed. Hydrogen atoms (H0) of thermal energy distribution are produced by dissociation of hydrogen molecules in a radio‐frequency (rf) glow discharge. The resulting mixture of atoms and molecules is allowed to flow from the discharge vessel to the vacuum test chamber through a capillary, resulting in the formation of a beam. Dissociation fractions [ 1/2 H0/(H2+ 1/2 H0)] of >0.5 and H0 fluxes of >2×1017 H0/s were achieved. Locating the rf power source adjacent to the discharge vessel resulted in a compact device which is easy to maintain and operate.
Databáze: OpenAIRE