Film Properties and Photoluminescence Characteristics of Hydrogenated Amorphous Silicon Nanoball Films Fabricated using Ar/H2 Mixture Gas Plasma

Autor:	Yosuke Motoyama, Isamu Kato, Ryouhei Saito
Rok vydání:	2004
Předmět:	Amorphous silicon chemistry.chemical_compound Photoluminescence Materials science Chemical engineering chemistry Gas plasma Electrical and Electronic Engineering Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	SHINKU. 47:644-651
ISSN:	1880-9413 0559-8516
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d0a3e3599530b3fa670932dd72f02e11 https://doi.org/10.3131/jvsj.47.644 Zobrazit plný text záznamu