Depositing ALD-oxides on MLD-metalcones: enhancing initial growth through O2 plasma densification
| Autor: | Juan Santo Domingo Peñaranda, Matthias M. Minjauw, Sofie S. T. Vandenbroucke, Robin Petit, Jin Li, Jolien Dendooven, Christophe Detavernier |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | Dalton Transactions. |
| ISSN: | 1477-9234 1477-9226 |
| DOI: | 10.1039/d3dt00378g |
| Popis: | The world of flexible devices has brought the interest to combine ALD and MLD films. However, direct ALD on MLD can suffer from stability/growth issues. Utilising O2 plasma, their compatibility can be enhanced, providing a more effective stacking. |
| Databáze: | OpenAIRE |
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