Photo-assisted silicon micromachining: opportunities for chemical sensing
| Autor: | Richard Mlcak, Harry L. Tuller |
|---|---|
| Rok vydání: | 1996 |
| Předmět: |
Microelectromechanical systems
Fabrication Materials science Silicon Metals and Alloys chemistry.chemical_element Nanotechnology Condensed Matter Physics Chemical sensor Surfaces Coatings and Films Electronic Optical and Magnetic Materials Surface micromachining Transducer Membrane chemistry Materials Chemistry Electrical and Electronic Engineering Instrumentation Silicon micromachining |
| Zdroj: | Sensors and Actuators B: Chemical. 35:255-261 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/s0925-4005(97)80064-0 |
| Popis: | Micromachining methods allow for the fabrication of small, three-dimensional structures including membranes, micro-valves, and pumps, channels, etc., in materials such as silicon. When integrated with microcircuitry this provides for the opportunity of creating unique miniature ‘smart’ chemical sensing devices. We present a novel method of photo-assisted electrochemical silicon micromachining which allows for the fabrication of stress-free submicrometer thick beams, membranes, and high aspect ratio three-dimensional structures, whose complex surface topologies were previously inaccessible by conventional processing routes. We discuss a number of gas and chemical sensor structures which benefit from MEMS technology and would benefit further from the processing versatility provided by our new micromachining fabrication method. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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